| 7.42338 % | AWM Investment Company, Inc. | 9,863,887 | 149,188 | |
| 6.34472 % | The Vanguard Group, Inc. | 8,430,602 | 1,037,616 | |
| 6.19338 % | Royce Investment Partners | 8,229,512 | 247,680 | |
| 6.03880 % | BlackRock Institutional Trust Company, N.A. | 8,024,112 | 6,561,240 | |
| 3.01033 % | Telemark Asset Management, LLC | 4,000,000 | 1,000,000 | |
| 2.63246 % | Geode Capital Management, L.L.C. | 3,497,900 | 1,806,632 | |
| 2.00759 % | Murray (Michael Andrew) | 2,667,608 | 689 | |
| 1.52715 % | State Street Global Advisors (US) | 2,029,220 | 1,404,217 | |
| 1.15521 % | Herald Investment Management Limited | 1,535,000 | 0 | |
| 1.09172 % | Fubon Asset Management Company Ltd. | 1,450,627 | -25,793 | |
| 1.03970 % | Marshall Wace LLP | 1,381,509 | -1,044,637 | |
| 0.96315 % | Archon Capital Management LLC | 1,279,797 | -703,578 | |
| 0.90195 % | Mitsubishi UFJ Asset Management Co., Ltd. | 1,198,470 | 1,198,470 | |
| 0.86733 % | Northern Trust Investments, Inc. | 1,152,474 | 846,108 | |
| 0.79752 % | Silverberg Bernstein Capital Management, LLC | 1,059,709 | 322,205 | |
| 0.72874 % | UBS Financial Services, Inc. | 968,323 | 597,574 | |
| 0.47479 % | Sneider (Richard A) | 630,883 | -4,065,404 | |
| 0.40980 % | Baker (Paul Christopher) | 544,531 | 10,188 | |
| 0.34417 % | BlackRock Investment Management, LLC | 457,316 | 437,034 | |
| 0.32449 % | Axiom Asset Management | 431,168 | -6,950 | |
| 0.32062 % | Charles Schwab Investment Management, Inc. | 426,023 | 376,182 | |
| 0.31658 % | Morgan Stanley & Co. LLC | 420,664 | 336,196 | |
| 0.30387 % | Qube Research & Technologies Ltd | 403,764 | -503,395 | |
| 0.24196 % | Hsieh (Chi Chia Dr.) | 321,500 | 0 | |
| 0.24003 % | BlackRock Financial Management, Inc. | 318,947 | 318,947 | |
| 0.23458 % | Stifel, Nicolaus & Company, Incorporated | 311,701 | 19,503 | |
| 0.21556 % | Two Sigma Investments, LP | 286,433 | -27,930 | |
| 0.20576 % | RBC Dominion Securities, Inc. | 273,400 | 271,400 | |
| 0.19857 % | Barclays Bank PLC | 263,852 | 261,022 | |
| 0.17925 % | BNY Mellon Asset Management | 238,175 | 227,543 | |
| 0.17878 % | DNB Asset Management AS | 237,556 | 63,638 | |
| 0.17790 % | T. Rowe Price International Ltd | 236,390 | 53,090 | |
| 0.16218 % | Cerity Partners LLC | 215,500 | 272 | |
| 0.15603 % | Fidelity Management & Research Company LLC | 207,330 | 194,132 | |
| 0.14640 % | Nuveen LLC | 194,530 | 194,530 | |
| 0.14562 % | Nieuwsma (David J) | 193,500 | 64,500 | |
| 0.14040 % | McAdam, LLC | 186,553 | 66,502 | |
| 0.13635 % | Susquehanna International Group, LLP | 181,177 | -1,817,506 | |
| 0.13316 % | ProShare Advisors LLC | 176,933 | 176,933 | |
| 0.13132 % | Quadrature Capital LLP | 174,487 | 87,018 | |
| 0.12732 % | Rhumbline Advisers Ltd. Partnership | 169,177 | 169,177 | |
| 0.12041 % | PFG Investments, LLC | 160,000 | 160,000 | |
| 0.11966 % | Avery (Jill Janice) | 159,000 | 64,500 | |
| 0.10956 % | IMC Chicago, LLC | 145,585 | 145,585 | |
| 0.10912 % | AMG National Trust Bank | 145,000 | 0 | |
| 0.10699 % | White Pine Capital, L.L.C. | 142,160 | 2,093 | |
| 0.10679 % | XTX Markets LLC | 141,894 | 130,090 | |
| 0.10657 % | Murphy Pohlad Asset Management LLC | 141,600 | -11,600 | |
| 0.10160 % | Brewington (James K) | 135,000 | 10,000 | |
| 0.09708 % | Walsh (Paul V Jr) | 129,000 | 64,500 | |
| 0.09708 % | Seif Margaret K | 129,000 | 64,500 | |
| 0.09119 % | Group One Trading, L.P. | 121,171 | 121,171 | |
| 0.09118 % | Simplex Trading, LLC | 121,161 | 39,480 | |
| 0.08159 % | SG Americas Securities, L.L.C. | 108,413 | 108,413 | |
| 0.08135 % | Focused Wealth Management, Inc. | 108,097 | 0 | |
| 0.07618 % | Morgan Stanley Smith Barney LLC | 101,229 | -4,065 | |
| 0.07150 % | Millennium Management LLC | 95,006 | -2,057,484 | |
| 0.06891 % | MetLife Investment Management, LLC | 91,567 | 91,567 | |
| 0.06306 % | Sequoia Financial Group, LLC | 83,790 | 83,790 | |
| 0.06158 % | Mirae Asset Global Investments (USA) LLC | 81,825 | 81,825 | |
| 0.05960 % | INTECH Investment Management LLC | 79,190 | 79,190 | |
| 0.05915 % | Invesco Advisers, Inc. | 78,590 | 78,590 | |
| 0.05886 % | Caption Management, LLC | 78,217 | -131,869 | |
| 0.05793 % | Penbrook Management, LLC | 76,975 | -16,350 | |
| 0.05771 % | Affinity Capital Advisors, LLC | 76,687 | 0 | |
| 0.05769 % | Wells Fargo Bank, N.A. | 76,658 | 76,658 | |
| 0.05394 % | Mellon Investments Corporation | 71,679 | 71,678 | |
| 0.05317 % | JPMorgan Private Bank (United States) | 70,654 | 70,654 | |
| 0.04958 % | Fisher Investments | 65,875 | 10,515 | |
| 0.04944 % | Peak6 Capital Management LLC | 65,700 | -5,500 | |
| 0.04890 % | PGGM Vermogensbeheer B.V. | 64,972 | -8,873 | |
| 0.04741 % | Oppenheimer Asset Management Inc. | 63,000 | 5,000 | |
| 0.04681 % | New York State Common Retirement Fund | 62,200 | 62,200 | |
| 0.04256 % | Manulife Investment Management (North America) Limited | 56,548 | 53,298 | |
| 0.04160 % | Metropolitan Life Insurance Co. (US) | 55,276 | 55,276 | |
| 0.03995 % | Citi Investment Research (US) | 53,083 | 51,831 | |
| 0.03946 % | Goldman Sachs Asset Management, L.P. | 52,432 | 26,938 | |
| 0.03688 % | BofA Global Research (US) | 49,008 | 46,969 | |
| 0.03621 % | SBI Securities Co., Ltd. | 48,109 | -8,412 | |
| 0.03229 % | Voya Investment Management LLC | 42,904 | 42,904 | |
| 0.03204 % | Foundations Investment Advisors, LLC | 42,568 | 0 | |
| 0.03033 % | Texas Capital Bank Private Wealth Advisors | 40,300 | 0 | |
| 0.02899 % | Invesco Capital Management LLC | 38,527 | 38,527 | |
| 0.02432 % | Police and Firemen's Retirement System of New Jersey | 32,312 | 32,312 | |
| 0.02258 % | Marathon Capital Management | 30,000 | 0 | |
| 0.01998 % | Wolverine Trading, LLC | 26,549 | -68,049 | |
| 0.01745 % | Northern Trust Global Investments | 23,193 | 22,938 | |
| 0.01744 % | Jane Street Capital, L.L.C. | 23,171 | -17,213 | |
| 0.01740 % | Modera Wealth Management, LLC | 23,127 | 0 | |
| 0.01704 % | Goldman Sachs & Company, Inc. | 22,645 | -627,493 | |
| 0.01656 % | Concurrent Investment Advisors, LLC | 22,000 | -30,575 | |
| 0.01580 % | AllianceBernstein L.P. | 21,000 | 21,000 | |
| 0.01562 % | Vanguard Personalized Indexing Management, LLC | 20,755 | 2,298 | |
| 0.01524 % | Oconnor Financial Group LLC | 20,252 | 20,252 | |
| 0.01505 % | Northside Capital Management, LLC | 20,000 | 0 | |
| 0.01392 % | EverSource Wealth Advisors, LLC | 18,500 | 0 | |
| 0.01386 % | CIBC World Markets Corp. | 18,422 | 18,422 | |
| 0.01367 % | Victory Capital Management Inc. | 18,168 | 241 | |
| 0.01279 % | Corebridge Financial Inc. | 16,998 | 16,998 | |
| 0.01261 % | Cetera Investment Advisers LLC | 16,751 | -1,250 | |