| 11.05145 % | BlackRock Institutional Trust Company, N.A. | 4,364,218 | -126,669 | |
| 8.37408 % | Advantest Corp | 3,306,924 | 0 | |
| 8.04345 % | The Vanguard Group, Inc. | 3,176,359 | 26,851 | |
| 6.48892 % | Kibarian (John Kachig) | 2,562,474 | 50,000 | |
| 4.84553 % | Needham Investment Management L.L.C. | 1,913,500 | 48,500 | |
| 3.91781 % | Michaels (Kimon W) | 1,547,142 | -33,047 | |
| 3.88901 % | Emerald Advisers LLC | 1,535,771 | -7,417 | |
| 3.01690 % | Wasatch Global Investors Inc | 1,191,373 | 41,977 | |
| 3.00603 % | William Blair Investment Management, LLC | 1,187,083 | 61,124 | |
| 2.87993 % | State Street Global Advisors (US) | 1,137,286 | -12,000 | |
| 2.36970 % | Samjo Capital, LLC | 935,794 | 65,620 | |
| 2.22106 % | Ranger Investment Management, L.P. | 877,095 | -9,718 | |
| 2.14345 % | Dimensional Fund Advisors, L.P. | 846,450 | -7,756 | |
| 2.05783 % | Snyder Capital Management, L.P. | 812,639 | 59,029 | |
| 2.02990 % | Janus Henderson Investors | 801,606 | 9 | |
| 1.98709 % | Geode Capital Management, L.L.C. | 784,701 | 44,641 | |
| 1.54821 % | Divisar Capital Management, LLC | 611,387 | 64,177 | |
| 1.06048 % | Silverberg Bernstein Capital Management, LLC | 418,783 | 90,467 | |
| 1.06025 % | Thrivent Asset Management, LLC | 418,693 | 53,037 | |
| 0.86408 % | Connor, Clark & Lunn Investment Management Ltd. | 341,227 | 91,068 | |
| 0.81519 % | Northern Trust Investments, Inc. | 321,917 | -4,214 | |
| 0.79705 % | Morgan Stanley & Co. LLC | 314,756 | 131,711 | |
| 0.79681 % | Russell Investments Trust Company | 314,659 | 55,569 | |
| 0.77728 % | Nuveen LLC | 306,948 | 170,589 | |
| 0.73065 % | Charles Schwab Investment Management, Inc. | 288,532 | 5,780 | |
| 0.58413 % | Fidelity Management & Research Company LLC | 230,674 | 41,292 | |
| 0.53472 % | Acadian Asset Management LLC | 211,161 | 42,093 | |
| 0.50646 % | Herald Investment Management Limited | 200,000 | 0 | |
| 0.50061 % | Segall Bryant & Hamill, LLC | 197,691 | 33,453 | |
| 0.48799 % | Parametric Portfolio Associates LLC | 192,706 | -17,694 | |
| 0.43773 % | D. E. Shaw & Co., L.P. | 172,861 | -5,850 | |
| 0.40522 % | MAK Capital One, LLC | 160,020 | 160,020 | |
| 0.40217 % | CenterBook Partners LP | 158,816 | 41,905 | |
| 0.39696 % | Qube Research & Technologies Ltd | 156,759 | 69,187 | |
| 0.39347 % | Principal Global Investors (Equity) | 155,381 | 494 | |
| 0.36014 % | Kent Lake PR LLC | 142,221 | 142,221 | |
| 0.33513 % | Rhumbline Advisers Ltd. Partnership | 132,343 | 46,908 | |
| 0.30902 % | Mellon Investments Corporation | 122,033 | -1,410 | |
| 0.30384 % | UBS Financial Services, Inc. | 119,986 | 35,752 | |
| 0.30142 % | BlackRock Advisors (UK) Limited | 119,030 | 439 | |
| 0.29038 % | PENN Capital Management Company, Inc. | 114,670 | 6,037 | |
| 0.28754 % | BlackRock Asset Management Ireland Limited | 113,549 | -17,212 | |
| 0.27039 % | PSP Investments | 106,778 | 8,460 | |
| 0.26938 % | Mutual of America Capital Management LLC | 106,377 | 8,204 | |
| 0.26518 % | Algert Global LLC | 104,720 | 30,300 | |
| 0.26496 % | Columbia Threadneedle Investments (US) | 104,632 | 35,195 | |
| 0.25849 % | Citadel Advisors LLC | 102,076 | 48,658 | |
| 0.25840 % | DWS Investments UK Limited | 102,043 | -4,569 | |
| 0.25635 % | BlackRock Investment Management, LLC | 101,233 | 17,625 | |
| 0.25602 % | BlackRock Financial Management, Inc. | 101,101 | 11,972 | |
| 0.23218 % | Rice Hall James & Associates, LLC | 91,689 | 91,689 | |
| 0.22609 % | Legal & General Investment Management Ltd. | 89,281 | 2,381 | |
| 0.21207 % | Bridge City Capital, LLC | 83,747 | 3,852 | |
| 0.18873 % | Invesco Capital Management LLC | 74,528 | 5,748 | |
| 0.17549 % | Renaissance Technologies LLC | 69,300 | 16,500 | |
| 0.16489 % | Aperio Group, LLC | 65,114 | 6,155 | |
| 0.16460 % | ArrowMark Colorado Holdings, LLC | 65,000 | 65,000 | |
| 0.16367 % | Strojwas Andrzej | 64,633 | 8,000 | |
| 0.15907 % | Barclays Bank PLC | 62,815 | 21,382 | |
| 0.15571 % | BNY Mellon Asset Management | 61,490 | 2,514 | |
| 0.15219 % | Schweizerische Nationalbank | 60,100 | 0 | |
| 0.15044 % | Dana Investment Advisors, Inc. | 59,410 | -7,106 | |
| 0.14787 % | Voya Investment Management LLC | 58,395 | -560 | |
| 0.14772 % | UBS Asset Management (Switzerland) | 58,336 | 22,130 | |
| 0.13934 % | Morgan Stanley Investment Management Inc. (US) | 55,026 | 2,114 | |
| 0.13908 % | AQR Capital Management, LLC | 54,923 | 27,183 | |
| 0.13503 % | Managed Account Advisors LLC | 53,322 | 12,269 | |
| 0.13465 % | Squarepoint Capital LLP | 53,174 | -34,412 | |
| 0.12692 % | BofA Global Research (US) | 50,121 | 22,565 | |
| 0.12548 % | Envestnet Asset Management, Inc. | 49,553 | -2,603 | |
| 0.12334 % | Marshall Wace LLP | 48,707 | -40,604 | |
| 0.12245 % | Dark Forest Capital Management LP | 48,357 | 48,357 | |
| 0.11980 % | Asset Management One Co., Ltd. | 47,309 | -18,918 | |
| 0.11921 % | Brown Advisory | 47,077 | -1,061 | |
| 0.11801 % | Walleye Capital LLC | 46,604 | 46,604 | |
| 0.11704 % | Susquehanna International Group, LLP | 46,220 | 8,175 | |
| 0.11683 % | Millrace Asset Group, Inc. | 46,136 | -13,151 | |
| 0.11452 % | Wells Fargo Advisors | 45,225 | 356 | |
| 0.11428 % | Raza (Adnan) | 45,130 | 35,000 | |
| 0.11192 % | Janney Montgomery Scott LLC | 44,198 | 44,198 | |
| 0.11061 % | Fisher Investments | 43,679 | -3,630 | |
| 0.10920 % | Erba (Nancy) | 43,122 | 7,429 | |
| 0.10736 % | Susquehanna Fundamental Investments, LLC | 42,397 | -1,382 | |
| 0.10521 % | Loomis, Sayles & Company, L.P. | 41,546 | 41,546 | |
| 0.10187 % | Canada Life Asset Management Limited | 40,230 | 0 | |
| 0.10141 % | Arrowstreet Capital, Limited Partnership | 40,047 | 0 | |
| 0.09897 % | Allspring Global Investments, LLC | 39,082 | -41,384 | |
| 0.09809 % | Creative Planning, Inc. | 38,734 | 2,145 | |
| 0.09690 % | Bronson (Joseph R) | 38,267 | 7,429 | |
| 0.09411 % | Goldman Sachs Asset Management, L.P. | 37,164 | 2,578 | |
| 0.09224 % | Tudor Investment Corporation | 36,425 | -1,617 | |
| 0.09220 % | Gustafson (Michael B.) | 36,408 | 7,429 | |
| 0.09197 % | J.P. Morgan Securities LLC | 36,320 | -15,099 | |
| 0.08453 % | AllianceBernstein L.P. | 33,380 | -925 | |
| 0.08352 % | PGIM Quantitative Solutions LLC | 32,981 | 1,853 | |
| 0.08103 % | Williams Jones Wealth Management LLC | 32,000 | 0 | |
| 0.08047 % | Millennium Management LLC | 31,778 | -42,144 | |
| 0.07889 % | Citi Investment Research (US) | 31,154 | -15,175 | |
| 0.07631 % | First Trust Advisors L.P. | 30,136 | 30,136 | |
| 0.07628 % | Tennessee Consolidated Retirement System | 30,122 | 9,235 | |